NEW Product:

UV-LED LIGHT SOURCE

Upgrade Kit EW04-XX

FOR WAFER EDGE EXPOSURE (WEE)

Applicable tools:

TEL Clean Track™ i-Line or g-Line

Mark-V Mark-Vz	Upgrade Kit:	EW04-V
Mark-7 Mark-8	Upgrade Kit:	EW04-VZ
ACT-8 ACT-12	Upgrade Kit:	EW04-AT

UV-LED Light source Flyer.

Features:

Drop-in replacement, no TEL Clean Track™ modification needed
- LED UV (high intensity) light source
  - Single wavelength (g-line or i-line)
    - Very long LED lifetime (up to 30.000 hours continuous lighting)
      - Pulse mode operation
        
        Mercury (Hg) free
        
        No IR light spectrum, (reduced thermal loading)
        
        Compact, ¼ size of original power unit
        
        I/O control via TEL Clean Track™
        
        Existing intensity measurement can still be used
        
        No fiber optics, no mechanical shutter, no lamp holder
        
        Proven design, >140 units installed in Asia
        
        CE/UL certified

Benefits:

No Hg waste material (recycling cost)
- No need for frequent lamp change
  - Increased MTBF (lack of fiber optics, mechanical shutter and lamp holder)
    - Reduced PM (0% IR radiation reduces PR out gassing, less lens cleaning)
      - Time needed to upgrade to LED light source is only about 0,5 day
        
        Existing recipes can be uploaded
        
        Closed loop intensity control included
        
        Possibility to increase wafer throughput with higher light intensity
        
        COO reduction (amortization within 1-2 years)
        
        Reduces CO₂ footprint

NEW Product:

Canon Optron Inc.

Calcium Flouride (CaF2) optical crystals

Fluorite has a wide transmittance wavelength region, and has the properties of low refraction, low dispersion, and anomalous partial dispersion. Because of these characteristics, fluorite is used in various products, ranging from a super achromatic (apochromat) telephoto lens that completely eliminates the secondary color aberration to a zoom lens, television camera, and astronomical telescope. UV grade is available, which is excellent in transmittance in the vacuum ultraviolet region.

Barium Flouride (BaF2) optical crystals

Barium fluoride exhibits a wide transmittance wavelength range of up to 13 μm in the infrared region, the widest among fluorides. Due to this property, barium fluoride is commonly used for optical materials used in analysis devices that employ infrared waves as well as high power infrared lasers.

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Canon Optron Inc. Product Info

NEW Product:

Canon Optron Inc.

Fluorescent Materials

Technology developed from the manufacturing of fluorite lenses for cameras was applied to develop fluorescent materials with fluorite (CaF2) as the main component. This material offers a wealth of color variations, such as a fluorescent material that emits one of two colors depending on the light source.
Unlike organic fluorescent materials, regardless of the UV light exposure this material experiences almost no drop-off in emission intensity and its color remains constant even when under UV light for extended periods. These properties make the material suitable for use in many applications where conventional materials do not perform well.

Some of the many possible applications include ornaments and anti-counterfeiting.

Single color FLUOBRIGHT

This material emits just one color under UV exposure, meaning there is no color change when the stimulating wavelength is changed.

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Dual color FLUOBRIGHT

The materials emit different colors when excited at around 365 nm, which is the typical wavelength of UV light and when excited at around 255 nm, the wavelength used for sterilization and other applications.
Because of the material’s stable color and emission intensity, it can be used to detect imitations as a means to stop counterfeiting.

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Canon Optron Inc. Product Info

NEW Product:

Canon Optron Inc.

Evaporation and Coating Materials

1. Hydrophilic Coating: PHILICFINE HP

The calcium phosphate coating materials can provide a clear.
They exhibit hydrophilic performance in dark places or outdoors where photocatalysts used as general hydrophilic coating materials are disadvantageous.
Three variants are available: HP-1, HP-2 and HP-3

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2. Super Hydrophobic Coating: SURFACECLEAR100

This fluorine coating material makes it easier to remove water and oily residues. It is extremely durable and meets the world’s highest abrasion resistance standards.

3. Antistatic Coating: LUMILEAD TNO

Anti-static property prevents dust and pollen adhesion

4. Gas-barrier Coating: LUMILEAD SiO

This material reduces splashes during evaporation.
It lessens the occurrence of pinholes and adhesion of foreign matter caused by splashes and provides excellent gas-barrier performance. Effective in preventing film cracking and peeling.