NEW Product:  

UV-LED LIGHT SOURCE

Upgrade Kit EW04-XX

FOR WAFER EDGE EXPOSURE (WEE)

Applicable tools:

TEL Clean Track™  i-Line or g-Line 

 UV-LED Light source Flyer.

 Features:

• Drop-in replacement, no TEL Clean Track™ modification needed
  • LED UV (high intensity) light source
    • Single wavelength (g-line or i-line)
      • Very long LED lifetime (up to 30.000 hours continuous lighting)
        • Pulse mode operation
          • Mercury (Hg) free
            • No IR light spectrum, (reduced thermal loading)
              • Compact, ¼ size of original power unit
                • I/O control via TEL Clean Track™
                  • Existing intensity measurement can still be used
                    • No fiber optics, no mechanical shutter, no lamp holder
                      • Proven design, >140 units installed in Asia
                        • CE/UL certified

Benefits:

• No Hg waste material (recycling cost)
  • No need for frequent lamp change
    • Increased MTBF (lack of fiber optics, mechanical shutter and lamp holder)
      • Reduced PM (0% IR radiation reduces PR out gassing, less lens cleaning)
        • Time needed to upgrade to LED light source is only about 0,5 day
          • Existing recipes can be uploaded
            • Closed loop intensity control included
              • Possibility to increase wafer throughput with higher light intensity
                • COO reduction (amortization within 1-2 years)
                  • Reduces CO₂ footprint