Vosselectronic GmbH

 

NEW Product:  

UV-LED LIGHT SOURCE

Upgrade Kit EW04-XX

FOR WAFER EDGE EXPOSURE (WEE)

 

Applicable tools:

TEL Clean Track™  i-Line or g-Line 

 

Mark-V
Mark-Vz
 Upgrade Kit: EW04-V 
Mark-7
Mark-8  
 Upgrade Kit: EW04-VZ
ACT-8
ACT-12 
 Upgrade Kit: EW04-AT

UV LED Lighting Source Video

    

pdfE UV-LED Light source Flyer.


 Features:

  • Drop-in replacement, no TEL Clean Track™ modification needed
    • LED UV (high intensity) light source
      • Single wavelength (g-line or i-line)
        • Very long LED lifetime (up to 30.000 hours continuous lighting)
          • Pulse mode operation
            • Mercury (Hg) free
              • No IR light spectrum, (reduced thermal loading)
                • Compact, ¼ size of original power unit
                  • I/O control via TEL Clean Track™
                    • Existing intensity measurement can still be used
                      • No fiber optics, no mechanical shutter, no lamp holder
                        • Proven design, >140 units installed in Asia
                          • CE/UL certified

Benefits:

  • No Hg waste material (recycling cost)
    • No need for frequent lamp change
      • Increased MTBF (lack of fiber optics, mechanical shutter and lamp holder)
        • Reduced PM (0% IR radiation reduces PR out gassing, less lens cleaning)
          • Time needed to upgrade to LED light source is only about 0,5 day
            • Existing recipes can be uploaded
              • Closed loop intensity control included
                • Possibility to increase wafer throughput with higher light intensity
                  • COO reduction (amortization within 1-2 years)
                    • Reduces CO2 footprint

 

Voss electronic GmbH, Feldkirchener Str. 7c, 85551 Kirchheim, Germany
Tel: +49 (0) 89-2011 177, Fax: +49 (0) 89-2012 877, Email: service@vosselectronic.de